Helyssen models RF plasmas and PECVD

Helyssen’s key expertise in modelling and understanding complex plasma process includes: 

• RF design :  matching circuit optimisation and antenna design
• Reactor design and modelling
• Plasma modelling for PECVD application

• Helyssen can help you to model your complex plasma system to better understand the inner processes and to optimize them

• Helyssen  develops COMSOL models for your specific applications

 

Helyssen automatic matching solutions

Helyssen designs and manufactures automated matching system including:

• Current-voltage-phase probe (1)
• Automatic controller (Raspberry Pi based) to drive the matching box (2)
• Real time matching box (3)
  • Frequency range from 1.7MHz to 50 MHz
  • RF power from 100W to 15kW or more